Spare Parts

Having spare parts on hand is critical for minimizing downtime and maintaining operational continuity when equipment fails unexpectedly. Ready access to spares allows maintenance teams to make immediate repairs, reducing production losses, service delays, and the risk of more extensive damage.

8080250K003
8080250K003
Absorber
Absorber
Coldhead Rebuild Kit
Coldhead Rebuild Kit

The Decontamination Manifold is required to remove contamination of the helium-gas circuit is indicated by sluggish or intermittent operation (ratchetting) of the cold head drive mechanism. With severe contamination the cold head drive may seize and fail to operate.

Rebuilding a cryopump restores its performance and reliability by replacing worn seals, gaskets, and internal components. Regular maintenance ensures ultra-high vacuum capability, prevents downtime, and keeps sensitive systems running smoothly.

Adsorbers are used to trap the cooling oil vapor as helium passes from the compressor heat exchanger. This is filled with a sorbent material which has a finite trapping capacity, replacement of this adsorber is recommended every 1-3 years depending on your compressor.

Decontamination Manifold

Absorbers

Coldhead Rebuild Kits

Cryo Temp Monitor

Cryo Temperature Monitor 240-2P Input Module
Cryo Temperature Monitor 240-2P Input Module

A Modular input solution for monitoring of cryopump temperature sensors. 10µA±.05, precision current source, 24VDC input. The analog voltage output signal is 2.375 VDC (330K) to 9.85 VDC (12K) that can be used with a PLC or computer. Slope formula supplied.

Charcoal Arrays

Charcoal Array
Charcoal Array

The charcoal array in a cryopump is critical for trapping and holding gases, enabling the pump to achieve ultra-high vacuum conditions. Its high surface area and low temperature allow for efficient adsorption of residual gases, ensuring stable vacuum performance and protecting sensitive vacuum processes. Replacing the Charcoal array is key to keep the performance of cryo at its peak.

Helium Lines

Helium Lines
Helium Lines

Cryopump helium lines deliver cryogenic helium to the coldhead, enabling efficient cooling of the pump’s surfaces and maintaining ultra-low temperatures for optimal vacuum performance. Keeping these clean of oil is key.

Cryo Fittings

Aeroquip
Aeroquip

Cryopump helium fittings, tees, unions, and couplings. Need to extend or replace worn parts we have your parts.